- Title
- Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing
- Creator
- Fowler, Anthony G.; Bazaei, Ali; Moheimani, S. O. Reza
- Relation
- ARC
- Relation
- IEEE Journal of Microelectromechanical Systems Vol. 22, Issue 3, p. 687-694
- Publisher Link
- http://dx.doi.org/10.1109/JMEMS.2013.2240261
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2013
- Description
- Conventional heaters used in microelectromechanical systems (MEMS) electrothermal displacement sensors typically feature a uniform cross section, which results in a nonuniform temperature profile. In this paper, electrothermal sensors with a shaped beam profile are introduced, with simulation results showing that a much flatter temperature distribution is achieved across the length of the heater. The proposed sensor design is implemented as the displacement sensor for a MEMS nanopositioner together with a more conventional electrothermal sensor design for comparative purposes. Experimental testing indicates that the shaped profile significantly improves upon the conventional sensor design in a number of areas, including sensitivity, linearity, and noise performance.
- Subject
- displacement sensor; microelectromechanical systems (MEMS) electrothermal sensing; silicon thermal heaters
- Identifier
- http://hdl.handle.net/1959.13/1299825
- Identifier
- uon:19956
- Identifier
- ISSN:1057-7157
- Language
- eng
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